Invention Grant
US07651874B2 Method and apparatus for localizing production errors in a semiconductor component part
失效
用于定位半导体部件中的生产误差的方法和装置
- Patent Title: Method and apparatus for localizing production errors in a semiconductor component part
- Patent Title (中): 用于定位半导体部件中的生产误差的方法和装置
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Application No.: US11465859Application Date: 2006-08-21
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Publication No.: US07651874B2Publication Date: 2010-01-26
- Inventor: Henning Nagel
- Applicant: Henning Nagel
- Applicant Address: DE Alzenau
- Assignee: Schott Solar AG
- Current Assignee: Schott Solar AG
- Current Assignee Address: DE Alzenau
- Agency: Dennison, Schultz & MacDonald
- Priority: DE102005040010 20050823
- Main IPC: H01L21/66
- IPC: H01L21/66
Abstract:
The invention relates to a method and to an arrangement for localizing production errors in a semiconductor component part by generating excess charge carriers in the semiconductor component part and by determining the electric potential in said part. In order to be able to localize production errors with simple measures and without damaging the semiconductor component part, it is suggested that the semiconductor component part be stimulated to become luminescent and that the locally resolved luminescence intensity distribution be determined in order to determine the locally resolved distribution of the electric potential in the semiconductor component part.
Public/Granted literature
- US20070048884A1 METHOD AND APPARATUS FOR LOCALIZING PRODUCTION ERRORS IN A SEMICONDUCTOR COMPONENT PART Public/Granted day:2007-03-01
Information query
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