Invention Grant
- Patent Title: CMOS image sensor and method for manufacturing the same
- Patent Title (中): CMOS图像传感器及其制造方法
-
Application No.: US11580388Application Date: 2006-10-12
-
Publication No.: US07651903B2Publication Date: 2010-01-26
- Inventor: In Gyun Jeon
- Applicant: In Gyun Jeon
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2005-0096365 20051013
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Disclosed are a CMOS image sensor and a method for manufacturing the same, for reducing or preventing damage to a photodiode and improving a pixel design margin to achieve scale down of a pixel. The CMOS image sensor includes an isolation layer in a semiconductor substrate, a gate electrode crossing a part of the isolation layer and the active area, a photodiode area in the active area, an insulating sidewall spacer on sides of the gate electrode, a metal silicide layer on the gate electrode and at least part of a surface of the photodiode area adjacent to the gate electrode, a metal layer electrically connecting the gate electrode to the photodiode area, and a dielectric layer on the entire surface of semiconductor substrate.
Public/Granted literature
- US20070085119A1 CMOS image sensor and method for manufacturing the same Public/Granted day:2007-04-19
Information query
IPC分类: