Invention Grant
US07651929B2 Hybrid oriented substrates and crystal imprinting methods for forming such hybrid oriented substrates 失效
用于形成这种混合取向基板的混合取向基板和晶体压印方法

Hybrid oriented substrates and crystal imprinting methods for forming such hybrid oriented substrates
Abstract:
A semiconductor structure with an insulating layer on a silicon substrate, a plurality of electrically-isolated silicon-on-insulator (SOI) regions separated from the substrate by the insulating layer, and a plurality of electrically-isolated silicon bulk regions extending through the insulating layer to the substrate. Each of one number of the SOI regions is oriented with a first crystal orientation and each of another number of the SOI regions is oriented with a second crystal orientation that differs from the first crystal orientation. The bulk silicon regions are each oriented with a third crystal orientation. Damascene or imprinting methods of forming the SOI regions and bulk silicon regions are also provided.
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