Invention Grant
US07651929B2 Hybrid oriented substrates and crystal imprinting methods for forming such hybrid oriented substrates
失效
用于形成这种混合取向基板的混合取向基板和晶体压印方法
- Patent Title: Hybrid oriented substrates and crystal imprinting methods for forming such hybrid oriented substrates
- Patent Title (中): 用于形成这种混合取向基板的混合取向基板和晶体压印方法
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Application No.: US11928456Application Date: 2007-10-30
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Publication No.: US07651929B2Publication Date: 2010-01-26
- Inventor: Louis Lu-Chen Hsu , Jack Allan Mandelman , William Robert Tonti
- Applicant: Louis Lu-Chen Hsu , Jack Allan Mandelman , William Robert Tonti
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans, LLP
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A semiconductor structure with an insulating layer on a silicon substrate, a plurality of electrically-isolated silicon-on-insulator (SOI) regions separated from the substrate by the insulating layer, and a plurality of electrically-isolated silicon bulk regions extending through the insulating layer to the substrate. Each of one number of the SOI regions is oriented with a first crystal orientation and each of another number of the SOI regions is oriented with a second crystal orientation that differs from the first crystal orientation. The bulk silicon regions are each oriented with a third crystal orientation. Damascene or imprinting methods of forming the SOI regions and bulk silicon regions are also provided.
Public/Granted literature
- US20080050890A1 HYBRID ORIENTED SUBSTRATES AND CRYSTAL IMPRINTING METHODS FOR FORMING SUCH HYBRID ORIENTED SUBSTRATES Public/Granted day:2008-02-28
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