Invention Grant
- Patent Title: III-nitride device with reduced piezoelectric polarization
- Patent Title (中): 具有降低的压电极化的III族氮化物器件
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Application No.: US11906823Application Date: 2007-10-04
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Publication No.: US07652311B2Publication Date: 2010-01-26
- Inventor: Robert Beach
- Applicant: Robert Beach
- Applicant Address: US CA El Segundo
- Assignee: International Rectifier Corporation
- Current Assignee: International Rectifier Corporation
- Current Assignee Address: US CA El Segundo
- Agency: Farjami & Farjami LLP
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L31/0328 ; H01L31/0336 ; H01L31/072 ; H01L31/109 ; H01L29/06 ; H01L29/22 ; H01L33/00

Abstract:
A III-nitride based field effect transistor obtains improved performance characteristics through manipulation of the relationship between the in-plane lattice constant of the interface of material layers. A high mobility two dimensional electron gas generated at the interface of the III-nitride materials permits high current conduction with low ON resistance, and is controllable through the manipulation of spontaneous polarization fields obtained according to the characteristics of the III-nitride material. The field effect transistor produced can be made to be a nominally on device where the in-plane lattice constants of the material forming the interface match. A nominally off device may be produced where one of the material layers has an in-plane lattice constant that is larger than that of the other layer material. The layer materials are preferably InAlGaN/GaN layers that are particularly tailored to the characteristics of the present invention.
Public/Granted literature
- US20080054303A1 Field effect transistor with enhanced insulator structure Public/Granted day:2008-03-06
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