Invention Grant
- Patent Title: Split-gate memory cells and fabrication methods thereof
- Patent Title (中): 分离栅存储单元及其制造方法
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Application No.: US11592290Application Date: 2006-11-03
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Publication No.: US07652318B2Publication Date: 2010-01-26
- Inventor: Chang-Jen Hsieh , Hung-Cheng Sung , Wen-Ting Chu , Chen-Ming Huang , Ya-Chen Kao , Shih-Chang Liu , Chi-Hsin Lo , Chung-Yi Yu , Chia-Shiung Tsai
- Applicant: Chang-Jen Hsieh , Hung-Cheng Sung , Wen-Ting Chu , Chen-Ming Huang , Ya-Chen Kao , Shih-Chang Liu , Chi-Hsin Lo , Chung-Yi Yu , Chia-Shiung Tsai
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
Split-gate memory cells and fabrication methods thereof. A split-gate memory cell comprises a plurality of isolation regions formed on a semiconductor substrate along a first direction, between two adjacent isolation regions defining an active region having a pair of drains and a source region. A pair of floating gates are disposed on the active regions and self-aligned with the isolation regions, wherein a top level of the floating gate is equal to a top level of the isolation regions. A pair of control gates are self-aligned with the floating gates and disposed on the floating gates along a second direction. A source line is disposed between the pair of control gates along the second direction. A pair of select gates are disposed on the outer sidewalls of the pair of control gates along the second direction.
Public/Granted literature
- US20080121975A1 Split-gate memory cells and fabrication methods thereof Public/Granted day:2008-05-29
Information query
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