Invention Grant
- Patent Title: Mirror device
- Patent Title (中): 镜像设备
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Application No.: US12220770Application Date: 2008-07-28
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Publication No.: US07652813B2Publication Date: 2010-01-26
- Inventor: Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto
- Applicant: Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08
Abstract:
A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof.
Public/Granted literature
- US20080285112A1 Mirror device Public/Granted day:2008-11-20
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