Invention Grant
- Patent Title: Line narrowing module
- Patent Title (中): 线窄模块
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Application No.: US12074079Application Date: 2008-02-28
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Publication No.: US07653112B2Publication Date: 2010-01-26
- Inventor: Walter D. Gillespie , Brian Strate
- Applicant: Walter D. Gillespie , Brian Strate
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Main IPC: H01S3/22
- IPC: H01S3/22

Abstract:
A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic.
Public/Granted literature
- US20080151944A1 Line narrowing module Public/Granted day:2008-06-26
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