Invention Grant
US07653985B1 Method of fabricating an RF MEMS switch with spring-loaded latching mechanism 有权
制造具有弹簧加载闭锁机构的RF MEMS开关的方法

Method of fabricating an RF MEMS switch with spring-loaded latching mechanism
Abstract:
Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.
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