Invention Grant
US07653985B1 Method of fabricating an RF MEMS switch with spring-loaded latching mechanism
有权
制造具有弹簧加载闭锁机构的RF MEMS开关的方法
- Patent Title: Method of fabricating an RF MEMS switch with spring-loaded latching mechanism
- Patent Title (中): 制造具有弹簧加载闭锁机构的RF MEMS开关的方法
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Application No.: US11823443Application Date: 2007-06-27
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Publication No.: US07653985B1Publication Date: 2010-02-02
- Inventor: David T. Chang , James H. Schaffner , Tsung-Yuan Hsu , Adele E. Schmitz
- Applicant: David T. Chang , James H. Schaffner , Tsung-Yuan Hsu , Adele E. Schmitz
- Applicant Address: US CA Malibu US IL Chicago
- Assignee: HRL Laboratories, LLC,Boeing
- Current Assignee: HRL Laboratories, LLC,Boeing
- Current Assignee Address: US CA Malibu US IL Chicago
- Agency: Ladas & Parry
- Main IPC: H01H11/00
- IPC: H01H11/00 ; H01H65/00

Abstract:
Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.
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