Invention Grant
US07654137B2 Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
失效
用于流体的耐腐蚀金属制传感器和使用传感器的流体供应装置
- Patent Title: Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
- Patent Title (中): 用于流体的耐腐蚀金属制传感器和使用传感器的流体供应装置
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Application No.: US10598290Application Date: 2005-01-13
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Publication No.: US07654137B2Publication Date: 2010-02-02
- Inventor: Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
- Applicant: Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
- Applicant Address: JP Osaka
- Assignee: Fujikin Incorporated
- Current Assignee: Fujikin Incorporated
- Current Assignee Address: JP Osaka
- Agency: Griffin & Szipl, P.C.
- Priority: JP2004-047701 20040224
- International Application: PCT/JP2005/000266 WO 20050113
- International Announcement: WO2005/080925 WO 20050901
- Main IPC: G01F1/68
- IPC: G01F1/68
Abstract:
The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
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