Invention Grant
- Patent Title: Vibratory gyrosensor having a vibration element provided with terminals
- Patent Title (中): 具有振动元件的振动陀螺仪具有端子
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Application No.: US10599833Application Date: 2006-02-23
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Publication No.: US07654139B2Publication Date: 2010-02-02
- Inventor: Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
- Applicant: Shigeto Watanabe , Junichi Honda , Shin Sasaki , Kazuo Takahashi , Teruo Inaguma , Koji Suzuki , Manabu Aizawa
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sonnenschein Nath & Rosenthal LLP
- Priority: JP2005-047802 20050223; JP2005-050962 20050225; JP2005-066051 20050309; JP2005-374325 20051227
- International Application: PCT/JP2006/030333 WO 20060223
- International Announcement: WO2006/090805 WO 20060831
- Main IPC: G01P9/04
- IPC: G01P9/04 ; G01C19/56

Abstract:
To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.
Public/Granted literature
- US20080257044A1 Vibratory Gyrosensor Public/Granted day:2008-10-23
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