Invention Grant
- Patent Title: XY stage
- Patent Title (中): XY阶段
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Application No.: US09655767Application Date: 2000-09-05
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Publication No.: US07654207B1Publication Date: 2010-02-02
- Inventor: Maho Shoji , Noriyuki Kubota , Junichiro Oishi
- Applicant: Maho Shoji , Noriyuki Kubota , Junichiro Oishi
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Agency: Muirhead and Saturnelli, LLC
- Priority: JP11-256689 19990910; JP11-365343 19991222
- Main IPC: A47B85/00
- IPC: A47B85/00

Abstract:
An XY stage comprises a base, a movable table which is disposed on the base so as to be movable in an X direction and a Y direction in an X-Y plane, and a work member which is provided on the movable table. The XY stage further comprises: a first linear motor for giving a driving force in the X direction to the movable table at the same height as the center of gravity of a movable section composed of the movable table and the work member; and a second linear motor for giving a driving force in the Y direction to the movable table at the same height as the center of gravity of the movable section.
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