Invention Grant
US07654815B2 Belt-shaped mold and nanoimprint system using the belt-shaped mold
失效
带状模具和纳米压印系统使用带状模具
- Patent Title: Belt-shaped mold and nanoimprint system using the belt-shaped mold
- Patent Title (中): 带状模具和纳米压印系统使用带状模具
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Application No.: US12191326Application Date: 2008-08-14
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Publication No.: US07654815B2Publication Date: 2010-02-02
- Inventor: Mitsuru Hasegawa , Masahiko Ogino
- Applicant: Mitsuru Hasegawa , Masahiko Ogino
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2007-251415 20070927
- Main IPC: B29C59/04
- IPC: B29C59/04

Abstract:
There is provided a fine pattern transfer, belt-shaped mold, with which a fine structure having a high aspect ratio can be formed rapidly and stably using nanoimprinting, and a fine pattern transfer system (a nanoimprint system) that employs this mold. According to the present invention, a nanoimprint mold includes: a belt-shaped support member; a plurality of stampers, for each of which a fine convex-and-concave pattern, to be transferred, is formed on one surface; and an adhesive member, to which the belt-shaped support member and the stampers are to be securely adhered, wherein the adhesive member includes a porous member and adhesive layers, which are deposited on either face of the porous member, for impregnating one part of the porous member, and wherein, for the porous member, a porous area that is not impregnated with the adhesive layers, is provided and positioned so as to sandwich the porous member between portions impregnated with the adhesive layers.
Public/Granted literature
- US20090087506A1 BELT-SHAPED MOLD AND NANOIMPRINT SYSTEM USING THE BELT-SHAPED MOLD Public/Granted day:2009-04-02
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