Invention Grant
- Patent Title: Multi-layer polishing pad
- Patent Title (中): 多层抛光垫
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Application No.: US10956617Application Date: 2004-10-01
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Publication No.: US07654885B2Publication Date: 2010-02-02
- Inventor: Stan D. Tsai , Shou-Sung Chang , Liang-Yuh Chen
- Applicant: Stan D. Tsai , Shou-Sung Chang , Liang-Yuh Chen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson A
- Main IPC: B24B29/00
- IPC: B24B29/00

Abstract:
A polishing pad has a polishing layer and a backing layer secured to the polishing layer. The polishing layer has a polishing surface, a first thickness, a first compressibility, and a hardness between about 40 to 80 Shore D. The backing layer has a second thickness greater than the first thickness and a second compressibility greater than the first compressibility. The first thickness, first compressibility, second thickness and second compressibility are such that the polishing surface deflects at least 2 mil under an applied pressure of 1 psi or less.
Public/Granted literature
- US20050098446A1 Multi-layer polishing pad Public/Granted day:2005-05-12
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