Invention Grant
US07654885B2 Multi-layer polishing pad 有权
多层抛光垫

Multi-layer polishing pad
Abstract:
A polishing pad has a polishing layer and a backing layer secured to the polishing layer. The polishing layer has a polishing surface, a first thickness, a first compressibility, and a hardness between about 40 to 80 Shore D. The backing layer has a second thickness greater than the first thickness and a second compressibility greater than the first compressibility. The first thickness, first compressibility, second thickness and second compressibility are such that the polishing surface deflects at least 2 mil under an applied pressure of 1 psi or less.
Public/Granted literature
Information query
Patent Agency Ranking
0/0