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US07655327B2 Composition comprising rare-earth dielectric 有权
包含稀土电介质的组合物

Composition comprising rare-earth dielectric
Abstract:
Compositions comprising a single-phase rare-earth dielectric disposed on a substrate. Embodiments of the present invention provide the basis for high-K gate dielectrics in conventional integrated circuits and high-K buried dielectrics as part of a semiconductor-on-insulator wafer structure.
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