Invention Grant
US07655362B2 Masks of semiconductor devices and methods of forming mask patterns
失效
半导体器件的掩模和形成掩模图案的方法
- Patent Title: Masks of semiconductor devices and methods of forming mask patterns
- Patent Title (中): 半导体器件的掩模和形成掩模图案的方法
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Application No.: US11022628Application Date: 2004-12-27
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Publication No.: US07655362B2Publication Date: 2010-02-02
- Inventor: Jun Seok Lee
- Applicant: Jun Seok Lee
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2003-0098321 20031227
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
Masks for semiconductor devices and methods of forming masks of semiconductor devices are provided which are capable of improving line resolution. A disclosed mask includes: a first mask pattern disposed on a first side of the mask. The first mask pattern includes light-blocking patterns and light-blocking fine auxiliary patterns within a light-transmitting region. The mask also includes a second mask pattern disposed on a second side of the mask. The second mask pattern includes light-transmitting fine auxiliary patterns within a light-blocking region. The light-transmitting fine auxiliary patterns are disposed at positions corresponding to the light-blocking fine auxiliary patterns to facilitate an overlapping exposing process. The second mask has the opposite tone of the first mask, and the second mask is disposed at a position horizontally-translated from a position of the first mask. Accordingly, pattern bridge regions in repeated patterns of a poly-cell transistor device can be selectively removed.
Public/Granted literature
- US20050142457A1 Masks of semiconductor devices and methods of forming mask patterns Public/Granted day:2005-06-30
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