Invention Grant
- Patent Title: Position sensor, method for detecting horizontal and vertical position, alignment apparatus including position sensor, and method for horizontal and vertical alignment
- Patent Title (中): 位置传感器，水平和垂直位置检测方法，对位装置，位置传感器，水平和垂直对准方法
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Application No.: US11549738Application Date: 2006-10-16
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Publication No.: US07655390B2Publication Date: 2010-02-02
- Inventor: Tomohiro Yamada , Natsuhiko Mizutani
- Applicant: Tomohiro Yamada , Natsuhiko Mizutani
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2003-126185 20030501
- Main IPC: G01N21/55
- IPC: G01N21/55
Abstract:
A position sensor has an interface structure between negative dielectrics and a dielectric, and is provided with a configuration in which the plasmon intensity with respect to a microstructure in a surface including the interface structure or in the vicinity thereof is detected by the interface structure, and the positional relationship between the interface structure and the microstructure is thereby detected.
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