Invention Grant
- Patent Title: Method for manufacturing industrial products and combination of masks for manufacturing the same
- Patent Title (中): 制造工业产品的方法和制造掩模的组合
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Application No.: US11325545Application Date: 2006-01-05
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Publication No.: US07655481B2Publication Date: 2010-02-02
- Inventor: Yuuichi Tatsumi
- Applicant: Yuuichi Tatsumi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-008402 20050114
- Main IPC: H01L21/66
- IPC: H01L21/66

Abstract:
A method for manufacturing an industrial product encompasses: forming a intermediate product pattern, which implements a part of a intermediate product of the industrial product by a sequence of processes corresponds to a part of a procedure for manufacturing the industrial product; forming an interconnect-changing insulator on the intermediate product pattern; boring sampling contact holes in the interconnect-changing insulator so as to make bare a part of the intermediate product pattern to define sampling sites; delineating evaluation interconnects on the interconnect-changing insulator so that each of the evaluation interconnects can electrically connected to at least one of the sampling sites of intermediate product pattern; and measuring an electrical resistance between subject sampling sites through the evaluation interconnects so as to detect a product defect in the intermediate product pattern.
Public/Granted literature
- US20060166384A1 Method for manufacturing industrial products and combination of masks for manufacturing the same Public/Granted day:2006-07-27
Information query
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