Invention Grant
US07655491B2 P-type Group III nitride semiconductor and production method thereof 有权
P型III族氮化物半导体及其制造方法

  • Patent Title: P-type Group III nitride semiconductor and production method thereof
  • Patent Title (中): P型III族氮化物半导体及其制造方法
  • Application No.: US10585999
    Application Date: 2005-05-11
  • Publication No.: US07655491B2
    Publication Date: 2010-02-02
  • Inventor: Hisayuki MikiHitoshi Takeda
  • Applicant: Hisayuki MikiHitoshi Takeda
  • Applicant Address: JP Tokyo
  • Assignee: Showa Denko K.K.
  • Current Assignee: Showa Denko K.K.
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2004-142657 20040512
  • International Application: PCT/JP2005/009008 WO 20050511
  • International Announcement: WO2005/109478 WO 20051117
  • Main IPC: H01L21/00
  • IPC: H01L21/00
P-type Group III nitride semiconductor and production method thereof
Abstract:
An object of the present invention is to provide a method for producing a p-type Group III nitride semiconductor which can be used to produce a light-emitting device exhibiting a low operation voltage and a sufficiently high reverse voltage.The inventive method for producing a p-type Group III nitride semiconductor comprises, during lowering temperature after completion of growth of a Group III nitride semiconductor containing a p-type dopant, immediately after completion of the growth, starting, at a temperature at which the growth has been completed, supply of a carrier gas composed of an inert gas and reduction of the flow rate of a nitrogen source; and stopping supply of the nitrogen source at a time in the course of lowering the temperature.
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