Invention Grant
US07655491B2 P-type Group III nitride semiconductor and production method thereof
有权
P型III族氮化物半导体及其制造方法
- Patent Title: P-type Group III nitride semiconductor and production method thereof
- Patent Title (中): P型III族氮化物半导体及其制造方法
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Application No.: US10585999Application Date: 2005-05-11
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Publication No.: US07655491B2Publication Date: 2010-02-02
- Inventor: Hisayuki Miki , Hitoshi Takeda
- Applicant: Hisayuki Miki , Hitoshi Takeda
- Applicant Address: JP Tokyo
- Assignee: Showa Denko K.K.
- Current Assignee: Showa Denko K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2004-142657 20040512
- International Application: PCT/JP2005/009008 WO 20050511
- International Announcement: WO2005/109478 WO 20051117
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An object of the present invention is to provide a method for producing a p-type Group III nitride semiconductor which can be used to produce a light-emitting device exhibiting a low operation voltage and a sufficiently high reverse voltage.The inventive method for producing a p-type Group III nitride semiconductor comprises, during lowering temperature after completion of growth of a Group III nitride semiconductor containing a p-type dopant, immediately after completion of the growth, starting, at a temperature at which the growth has been completed, supply of a carrier gas composed of an inert gas and reduction of the flow rate of a nitrogen source; and stopping supply of the nitrogen source at a time in the course of lowering the temperature.
Public/Granted literature
- US20080246053A1 P-Type Group III Nitride Semiconductor and Production Method Thereof Public/Granted day:2008-10-09
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