Invention Grant
US07655499B2 Forming method of contact hole and manufacturing method of semiconductor device, liquid crystal display device and EL display device
有权
接触孔的形成方法和半导体器件的制造方法,液晶显示器件和EL显示器件
- Patent Title: Forming method of contact hole and manufacturing method of semiconductor device, liquid crystal display device and EL display device
- Patent Title (中): 接触孔的形成方法和半导体器件的制造方法,液晶显示器件和EL显示器件
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Application No.: US12368318Application Date: 2009-02-10
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Publication No.: US07655499B2Publication Date: 2010-02-02
- Inventor: Gen Fujii , Hiroko Shiroguchi
- Applicant: Gen Fujii , Hiroko Shiroguchi
- Applicant Address: JP Atsugi-shi, Kanagawa-Ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-Ken
- Agency: Nixon Peabody, LLP
- Agent Jeffrey L. Costellia
- Priority: JP2004-022039 20040129
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
When forming a contact hole by a conventional manufacturing step of a semiconductor device, a resist is required to be formed on almost entire surface of a substrate so as to be applied on a film other than an area in which a contact hole is to be formed, leading to drastically reduced throughput. According to a forming method of a contact hole and a manufacturing method of a semiconductor device, an EL display device and a liquid crystal display device of the invention, an island shape organic film is selectively formed over a semiconductor layer, a conductive layer or an insulating layer, and an insulating film is formed around the island shape organic film to form a contact hole. Therefore, a conventional patterning using a resist is not required, and high throughput and low cost can be achieved.
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