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US07655553B2 Microstructure sealing tool and methods of using the same 有权
微结构密封工具及其使用方法

Microstructure sealing tool and methods of using the same
Abstract:
A method of packing electronic devices and an apparatus thereof are disclosed herein. The method allows for usage of solder materials with a melting temperature of 180° C. or higher, such as from 210° C. to 300° C., and from 230° C. to 260° C., so as to provide reliable and robust packaging. This method is particularly useful for packaging electronic devices that are sensitive to temperatures, such as microstructures, which can be microelectromechanical devices (MEMS), such as micromirror array devices.
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