Invention Grant
- Patent Title: Microstructure sealing tool and methods of using the same
- Patent Title (中): 微结构密封工具及其使用方法
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Application No.: US11622179Application Date: 2007-01-11
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Publication No.: US07655553B2Publication Date: 2010-02-02
- Inventor: Gregory P. Schaadt
- Applicant: Gregory P. Schaadt
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Charles A. Brill; Wade James Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/44 ; B23K31/00

Abstract:
A method of packing electronic devices and an apparatus thereof are disclosed herein. The method allows for usage of solder materials with a melting temperature of 180° C. or higher, such as from 210° C. to 300° C., and from 230° C. to 260° C., so as to provide reliable and robust packaging. This method is particularly useful for packaging electronic devices that are sensitive to temperatures, such as microstructures, which can be microelectromechanical devices (MEMS), such as micromirror array devices.
Public/Granted literature
- US20070172991A1 MICROSTRUCTURE SEALING TOOL AND METHODS OF USING THE SAME Public/Granted day:2007-07-26
Information query
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