Invention Grant
- Patent Title: Methods and semiconductor structures for latch-up suppression using a conductive region
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Application No.: US12125381Application Date: 2008-05-22
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Publication No.: US07655985B2Publication Date: 2010-02-02
- Inventor: Toshiharu Furukawa , David Vaclav Horak , Charles William Koburger, III , Jack Allan Mandelman , William Robert Tonti
- Applicant: Toshiharu Furukawa , David Vaclav Horak , Charles William Koburger, III , Jack Allan Mandelman , William Robert Tonti
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans, LLP
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Semiconductor structures and methods for suppressing latch-up in bulk CMOS devices. The semiconductor structure comprises first and second adjacent doped wells formed in the semiconductor material of a substrate. A trench, which includes a base and first sidewalls between the base and the top surface, is defined in the substrate between the first and second doped wells. The trench is partially filled with a conductor material that is electrically coupled with the first and second doped wells. Highly-doped conductive regions may be provided in the semiconductor material bordering the trench at a location adjacent to the conductive material in the trench.
Public/Granted literature
- US20080217698A1 METHODS AND SEMICONDUCTOR STRUCTURES FOR LATCH-UP SUPPRESSION USING A CONDUCTIVE REGION Public/Granted day:2008-09-11
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