Invention Grant
- Patent Title: Electrically programmable π-shaped fuse structures and methods of fabrication thereof
- Patent Title (中): 电气可编程的pi形熔丝结构及其制造方法
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Application No.: US11768254Application Date: 2007-06-26
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Publication No.: US07656005B2Publication Date: 2010-02-02
- Inventor: Roger A. Booth, Jr. , Kangguo Cheng , Jack A. Mandelman , William R. Tonti
- Applicant: Roger A. Booth, Jr. , Kangguo Cheng , Jack A. Mandelman , William R. Tonti
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Heslin Rothenberg Farley & Mesiti, PC
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
Electrically programmable fuse structures for an integrated circuit and methods of fabrication thereof are presented, wherein the electrically programmable fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The first terminal portion and the second terminal portion reside over a first support and a second support, respectively, with the first support and the second support being spaced apart, and the fuse element bridging the distance between the first terminal portion over the first support and the second terminal portion over the second support. The fuse, first support and second support define a π-shaped structure in elevational cross-section through the fuse element. The first terminal portion, second terminal portion and fuse element are coplanar, with the fuse element residing above a void, which in one embodiment is filed by a thermally insulating dielectric material that surrounds the fuse element.
Public/Granted literature
- US20070247273A1 ELECTRICALLY PROGRAMMABLE PI-SHAPED FUSE STRUCTURES AND METHODS OF FABRICATION THEREOF Public/Granted day:2007-10-25
Information query
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