Invention Grant
- Patent Title: Split coil linear motor for z force
- Patent Title (中): 用于z力的分线圈线性电机
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Application No.: US11425793Application Date: 2006-06-22
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Publication No.: US07656062B2Publication Date: 2010-02-02
- Inventor: Michael B. Binnard
- Applicant: Michael B. Binnard
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: H02K41/00
- IPC: H02K41/00

Abstract:
Methods and apparatus for enabling a coil to be used to provide a net force along more than one axis are disclosed. According to one aspect of the present invention, an actuator includes a magnet assembly and a coil assembly. The coil assembly moves at least partially within the magnet arrangement, and includes a top coil half and a bottom coil half. The top coil half and the bottom coil half are independently controllable such that a first current applied to the top coil half may be independently applied from a second current applied to the bottom coil half.
Public/Granted literature
- US20060232142A1 Split Coil Linear Motor for Z Force Public/Granted day:2006-10-19
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