Invention Grant
- Patent Title: Surface wave sensor apparatus
- Patent Title (中): 表面波传感器装置
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Application No.: US11843527Application Date: 2007-08-22
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Publication No.: US07656070B2Publication Date: 2010-02-02
- Inventor: Michio Kadota , Koji Fujimoto
- Applicant: Michio Kadota , Koji Fujimoto
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP.
- Main IPC: H03H9/145
- IPC: H03H9/145

Abstract:
A surface wave sensor apparatus has a structure such that, on a first principal surface of a base substrate having first through-hole conductors, surface acoustic wave devices are bonded via thermo-compression anisotropic conductive sheets, on first principal surfaces of piezoelectric substrates of the surface acoustic wave devices, electrodes, such as IDTs, are provided, respectively. These electrodes extend toward second principal surfaces via second through-hole conductors and are provided in the piezoelectric substrates. The first through-hole conductors overlap with the second through-hole conductors with the thermo-compression anisotropic conductive sheets being disposed therebetween, respectively.
Public/Granted literature
- US20070284966A1 SURFACE WAVE SENSOR APPARATUS Public/Granted day:2007-12-13
Information query
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