Invention Grant
- Patent Title: Nanomanipulator used for analyzing or machining objects
- Patent Title (中): 用于分析或加工物体的纳米操纵器
-
Application No.: US11664988Application Date: 2005-09-27
-
Publication No.: US07656075B2Publication Date: 2010-02-02
- Inventor: Bert Voigtländer , Franz-Peter Coenen
- Applicant: Bert Voigtländer , Franz-Peter Coenen
- Applicant Address: DE Julich
- Assignee: Forschungzentrum Julich GmbH
- Current Assignee: Forschungzentrum Julich GmbH
- Current Assignee Address: DE Julich
- Agent Andrew Wilford
- Priority: DE102004049371 20041009
- International Application: PCT/DE2005/001702 WO 20050927
- International Announcement: WO2006/039887 WO 20060420
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
The invention relates to a nanomanipulator that is used for analyzing or machining objects. Said nanomanipulator is equipped with several moving elements which can be adjusted to perform movements and support the object that is to be moved or an object holder in order to move at least one object relative to an analyzing position or machining position. Each of said moving elements is provided with one support area for the object that is to be moved or the object holder. The moving elements support at least one load-bearing plane in an axial direction of the nanomanipulator. The inventive nanomanipulator is characterized by moving elements comprising shearing piezo elements so as to move the load-bearing plane.
Public/Granted literature
- US20090009033A1 Nanomanipulator Used for Analyzing or Machining Objects Public/Granted day:2009-01-08
Information query
IPC分类: