Invention Grant
US07656075B2 Nanomanipulator used for analyzing or machining objects 有权
用于分析或加工物体的纳米操纵器

Nanomanipulator used for analyzing or machining objects
Abstract:
The invention relates to a nanomanipulator that is used for analyzing or machining objects. Said nanomanipulator is equipped with several moving elements which can be adjusted to perform movements and support the object that is to be moved or an object holder in order to move at least one object relative to an analyzing position or machining position. Each of said moving elements is provided with one support area for the object that is to be moved or the object holder. The moving elements support at least one load-bearing plane in an axial direction of the nanomanipulator. The inventive nanomanipulator is characterized by moving elements comprising shearing piezo elements so as to move the load-bearing plane.
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