Invention Grant
- Patent Title: Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
- Patent Title (中): 在恶劣环境中保持热阴极的排放能力的方法和装置
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Application No.: US12229271Application Date: 2008-08-21
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Publication No.: US07656165B2Publication Date: 2010-02-02
- Inventor: Larry K. Carmichael , Michael D. Borenstein , Paul C. Arnold , Stephen C. Blouch , Richard A. Knott
- Applicant: Larry K. Carmichael , Michael D. Borenstein , Paul C. Arnold , Stephen C. Blouch , Richard A. Knott
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01N27/62
- IPC: G01N27/62 ; G01L21/30

Abstract:
A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.
Public/Granted literature
- US20080315887A1 Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments Public/Granted day:2008-12-25
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