Invention Grant
US07656528B2 Periodic patterns and technique to control misalignment between two layers
有权
周期性模式和技术来控制两层之间的对准
- Patent Title: Periodic patterns and technique to control misalignment between two layers
- Patent Title (中): 周期性模式和技术来控制两层之间的对准
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Application No.: US11673115Application Date: 2007-02-09
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Publication No.: US07656528B2Publication Date: 2010-02-02
- Inventor: Ibrahim Abdulhalim , Mike Adel , Michael Friedmann , Michael Faeyrman
- Applicant: Ibrahim Abdulhalim , Mike Adel , Michael Friedmann , Michael Faeyrman
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Davis Wright Tremaine LLP
- Main IPC: G01B11/00
- IPC: G01B11/00
Abstract:
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
Public/Granted literature
- US20070127025A1 Periodic Patterns and Technique to Control Misalignment Between Two Layers Public/Granted day:2007-06-07
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