Invention Grant
- Patent Title: Beam combiner employing a wedge-shaped cross-section
- Patent Title (中): 梁组合器采用楔形横截面
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Application No.: US11783289Application Date: 2007-04-06
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Publication No.: US07656583B2Publication Date: 2010-02-02
- Inventor: Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
- Applicant: Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microimaging GmbH
- Current Assignee: Carl Zeiss Microimaging GmbH
- Current Assignee Address: DE Jena
- Agency: Jacobson Holman PLLC
- Priority: DE102006034910 20060728
- Main IPC: G02B27/10
- IPC: G02B27/10

Abstract:
A beam corradiator for combining two radiation beams, preferably movable beams independent from each other in at least one direction, to scan and/or influence a sample, preferably a manipulation system and an imaging system, with a partially reflecting layer being provided for the corradiation, wherein the thickness of the layer is provided with a preferably consistent incline or decline over the optically effective cross-section of the beam corradiatior.
Public/Granted literature
- US20080130125A1 Corradiator employing a wedge-shaped cross-section Public/Granted day:2008-06-05
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