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US07656583B2 Beam combiner employing a wedge-shaped cross-section 有权
梁组合器采用楔形横截面

Beam combiner employing a wedge-shaped cross-section
Abstract:
A beam corradiator for combining two radiation beams, preferably movable beams independent from each other in at least one direction, to scan and/or influence a sample, preferably a manipulation system and an imaging system, with a partially reflecting layer being provided for the corradiation, wherein the thickness of the layer is provided with a preferably consistent incline or decline over the optically effective cross-section of the beam corradiatior.
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