Invention Grant
- Patent Title: Adjustment arrangement of an optical element
- Patent Title (中): 光学元件的调整布置
-
Application No.: US12211978Application Date: 2008-09-17
-
Publication No.: US07656595B2Publication Date: 2010-02-02
- Inventor: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
- Applicant: Klaus Beck , Bernhard Gellrich , Hubert Holderer , Thomas Petasch , Cornelia Roesch , Alexander Kohl
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE10140608 20010818
- Main IPC: G02B7/02
- IPC: G02B7/02

Abstract:
A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
Public/Granted literature
- US20090009892A1 Adjustment Arrangement of an Optical Element Public/Granted day:2009-01-08
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |