Invention Grant
US07657077B2 Detecting defects by three-way die-to-die comparison with false majority determination
有权
通过与多数确定的三次模 - 对数比较来检测缺陷
- Patent Title: Detecting defects by three-way die-to-die comparison with false majority determination
- Patent Title (中): 通过与多数确定的三次模 - 对数比较来检测缺陷
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Application No.: US11364103Application Date: 2006-02-28
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Publication No.: US07657077B2Publication Date: 2010-02-02
- Inventor: Detlef Michelsson , Steffen Gerlach , Bernd Jungmann
- Applicant: Detlef Michelsson , Steffen Gerlach , Bernd Jungmann
- Applicant Address: DE Weilburg
- Assignee: Vistec Semiconductor Systems GmbH
- Current Assignee: Vistec Semiconductor Systems GmbH
- Current Assignee Address: DE Weilburg
- Agency: Houston Eliseeva LLP
- Priority: DE102005011237 20050311
- Main IPC: G06K9/00
- IPC: G06K9/00 ; H01L21/66 ; G01N21/00
Abstract:
A method of determining defects in a plurality of images having essentially the same image contents is disclosed. A comparison operation is carried out once three fully comparable images having essentially the same image contents are present in the intermediate memory. The stored individual images are accessed randomly. A paired comparison operation between the three difference images is carried out.
Public/Granted literature
- US20060204109A1 Method for detecting defects in images Public/Granted day:2006-09-14
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