Invention Grant
- Patent Title: Product-related feedback for process control
- Patent Title (中): 与过程控制有关的产品相关反馈
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Application No.: US11251604Application Date: 2005-10-14
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Publication No.: US07657339B1Publication Date: 2010-02-02
- Inventor: Michael A. Retersdorf
- Applicant: Michael A. Retersdorf
- Applicant Address: KY Grand Cayman
- Assignee: GlobalFoundries, Inc.
- Current Assignee: GlobalFoundries, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correlated with the metrology data. A process control associated with a plurality of processes to be performed on a second workpiece is adjusted based upon the correlating.
Information query
