Invention Grant
US07657995B2 Method of fabricating a microelectromechanical system (MEMS) switch
失效
制造微机电系统(MEMS)开关的方法
- Patent Title: Method of fabricating a microelectromechanical system (MEMS) switch
- Patent Title (中): 制造微机电系统(MEMS)开关的方法
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Application No.: US11776835Application Date: 2007-07-12
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Publication No.: US07657995B2Publication Date: 2010-02-09
- Inventor: Louis Hsu , Timothy Dalton , Lawrence Clevenger , Carl Radens , Kwong Hon Wong , Chih-Chao Yang
- Applicant: Louis Hsu , Timothy Dalton , Lawrence Clevenger , Carl Radens , Kwong Hon Wong , Chih-Chao Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent H. Daniel Schnurmann
- Main IPC: H01H11/00
- IPC: H01H11/00 ; H01H65/00

Abstract:
A method of fabricating a MEMS switch that is fully integratable in a semiconductor fabrication line. The method consists of forming two posts, each end thereof terminating in a cap; a rigid movable conductive plate having a surface terminating in a ring in each of two opposing edges, the rings being loosely connected to guiding posts; forming upper and lower electrode pairs and upper and lower interconnect wiring lines connected and disconnected by the rigid movable conductive plate. The conductive plate moves up, shorting two upper interconnect wirings lines. Conversely, the conductive plate moves down when the voltage is applied to the lower electrode pair, while the upper electrode pair is grounded, shorting the two lower interconnect wiring lines and opening the upper wiring lines.
Public/Granted literature
- US20080014663A1 STRUCTURE AND METHOD OF FABRICATING A HINGE TYPE MEMS SWITCH Public/Granted day:2008-01-17
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