Invention Grant
- Patent Title: Method and apparatus of high speed property mapping
- Patent Title (中): 高速物业映射的方法和装置
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Application No.: US11537535Application Date: 2006-09-29
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Publication No.: US07658097B2Publication Date: 2010-02-09
- Inventor: Chanmin Su , Peter M. Lombrozo
- Applicant: Chanmin Su , Peter M. Lombrozo
- Applicant Address: US NY Plainview
- Assignee: Veeco Instruments Inc.
- Current Assignee: Veeco Instruments Inc.
- Current Assignee Address: US NY Plainview
- Agency: Boyle Fredrickson, SC
- Main IPC: G01B5/28
- IPC: G01B5/28 ; G01N13/16

Abstract:
A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.
Public/Granted literature
- US20070089498A1 METHOD AND APPARATUS OF HIGH SPEED PROPERTY MAPPING Public/Granted day:2007-04-26
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