Invention Grant
- Patent Title: Inertial sensor and manufacturing method of the same
- Patent Title (中): 惯性传感器及其制造方法相同
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Application No.: US11764096Application Date: 2007-06-15
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Publication No.: US07658109B2Publication Date: 2010-02-09
- Inventor: Hiroshi Fukuda , Yuko Hanaoka , Tsukasa Fujimori
- Applicant: Hiroshi Fukuda , Yuko Hanaoka , Tsukasa Fujimori
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2006-181056 20060630
- Main IPC: G01P15/125
- IPC: G01P15/125
Abstract:
A weight of an inertial sensor if formed from a plurality of divided weights, and the divided weights are connected to each other by elastically deformable beams. A movable range and a mass of each of the divided weights and a rigidity of each of the beams are adjusted and a plurality of deformation modes having different sensitivity ranges with respect to the acceleration are used in combination. By this means, it is possible to improve a detecting sensitivity of an acceleration and widen an acceleration response range.
Public/Granted literature
- US20080196502A1 INERTIAL SENSOR AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2008-08-21
Information query
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