Invention Grant
- Patent Title: Substrate storage container
- Patent Title (中): 基材储存容器
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Application No.: US12034040Application Date: 2008-02-20
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Publication No.: US07658290B2Publication Date: 2010-02-09
- Inventor: Atsushi Sumi , Junya Toda , Takayuki Nakayama
- Applicant: Atsushi Sumi , Junya Toda , Takayuki Nakayama
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Polymer Co., Ltd.
- Current Assignee: Shin-Etsu Polymer Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Darby & Darby P.C.
- Priority: JP2002-311275 20021025; JP2002-344954 20021128
- Main IPC: B65D51/16
- IPC: B65D51/16 ; B65D85/30 ; H01L21/02

Abstract:
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.
Public/Granted literature
- US20080149528A1 SUBSTRATE STORAGE CONTAINER Public/Granted day:2008-06-26
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