Invention Grant
- Patent Title: Pattern forming apparatus
- Patent Title (中): 图案形成装置
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Application No.: US10941475Application Date: 2004-09-15
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Publication No.: US07658601B2Publication Date: 2010-02-09
- Inventor: Kazuyuki Kasumi
- Applicant: Kazuyuki Kasumi
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Div
- Priority: JP2003-331938 20030924
- Main IPC: B29C59/02
- IPC: B29C59/02
Abstract:
A pattern forming apparatus maintaining alignment between a mold and a substrate. The pattern forming apparatus includes a press pressing the mold against the substrate in a pressing direction, and a mechanism to maintain orientation of the mold and the substrate perpendicular to the pressing direction.
Public/Granted literature
- US20050064054A1 Pattern forming apparatus Public/Granted day:2005-03-24
Information query
