Invention Grant
- Patent Title: Manufacturing device of semiconductor package and manufacturing method of semiconductor package
- Patent Title (中): 半导体封装制造装置及半导体封装的制造方法
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Application No.: US11882136Application Date: 2007-07-31
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Publication No.: US07659127B2Publication Date: 2010-02-09
- Inventor: Kimiharu Kayukawa , Michihiro Masuda , Takashige Saitoh
- Applicant: Kimiharu Kayukawa , Michihiro Masuda , Takashige Saitoh
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2006-278086 20061011
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A manufacturing device of a semiconductor package includes: a holding element for holding a substrate; a bonding element for holding the package and bonding a first metal bump of the package to a second metal bump of the substrate; a monitoring element for irradiating an infrared light toward the substrate and monitoring an electrode pad under the second metal bump based on a reflected light reflected on the pad; and a determination element for determining a state of a bonding surface between the first and second metal bumps based on monitoring information of the pad. The monitoring element faces the bonding element through the holding element, the substrate and the package.
Public/Granted literature
- US20080090313A1 Manufacturing device of semiconductor package and manufacturing method of semiconductor package Public/Granted day:2008-04-17
Information query
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