Invention Grant
US07659127B2 Manufacturing device of semiconductor package and manufacturing method of semiconductor package 失效
半导体封装制造装置及半导体封装的制造方法

Manufacturing device of semiconductor package and manufacturing method of semiconductor package
Abstract:
A manufacturing device of a semiconductor package includes: a holding element for holding a substrate; a bonding element for holding the package and bonding a first metal bump of the package to a second metal bump of the substrate; a monitoring element for irradiating an infrared light toward the substrate and monitoring an electrode pad under the second metal bump based on a reflected light reflected on the pad; and a determination element for determining a state of a bonding surface between the first and second metal bumps based on monitoring information of the pad. The monitoring element faces the bonding element through the holding element, the substrate and the package.
Information query
Patent Agency Ranking
0/0