Invention Grant
- Patent Title: Method for manufacturing CMOS image sensor
- Patent Title (中): CMOS图像传感器的制造方法
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Application No.: US11646096Application Date: 2006-12-26
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Publication No.: US07659133B2Publication Date: 2010-02-09
- Inventor: Sung Moo Kim
- Applicant: Sung Moo Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2005-0132782 20051228
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/8238

Abstract:
Disclosed is a method for manufacturing a CMOS image sensor, capable of preventing dopants implanted with high energy from penetrating into a lower part of a gate electrode when a photodiode is formed, thereby preventing current leakage of a transistor and variation of a threshold voltage. The method includes the steps of forming a gate electrode on a transistor area of a first conductive type semiconductor substrate including a photodiode area and the transistor area, forming a salicide layer on the gate electrode, and implanting second conductive type dopants for forming a photodiode in a photodiode area of the semiconductor substrate.
Public/Granted literature
- US20070155041A1 Method for Manufacturing CMOS image sensor Public/Granted day:2007-07-05
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