Invention Grant
- Patent Title: Semiconductor device fabrication method and semiconductor device
- Patent Title (中): 半导体器件制造方法和半导体器件
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Application No.: US11327483Application Date: 2006-01-09
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Publication No.: US07659135B2Publication Date: 2010-02-09
- Inventor: Yuji Asano , Morio Kato
- Applicant: Yuji Asano , Morio Kato
- Applicant Address: JP Tokyo
- Assignee: Fujitsu Microelectronics Limited
- Current Assignee: Fujitsu Microelectronics Limited
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2005-251120 20050831
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A semiconductor device fabrication method in which when a semiconductor device with a built-in light receiving element is fabricated, a section for dividing the light receiving element is protected from damage caused by, for example, etching. An antireflection coating is formed not only on a light receiving area in a divided photodiode area but on a division area including a junction area between a division section outside the light receiving area for dividing a photodiode and a cathode. A polycrystalline silicon film is formed so as to cover the antireflection coating. Accordingly, the antireflection coating on the junction area between the division section outside the light receiving area and the cathode is protected against, for example, etching by the polycrystalline silicon film. As a result, the appearance of a crystal defect, a change in impurity concentration, or the like is suppressed in this area. Therefore, a high-performance high-quality semiconductor device with a built-in photodiode can be fabricated.
Public/Granted literature
- US20070048890A1 Semiconductor device fabrication method and semiconductor device Public/Granted day:2007-03-01
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