Invention Grant
US07659140B2 Integrated circuit system with a debris trapping system 有权
具有碎片捕集系统的集成电路系统

Integrated circuit system with a debris trapping system
Abstract:
An integrated circuit system including: providing an integrated circuit wafer having an integrated circuit side and a backside; mounting a protective adhesive on the integrated circuit side of the integrated circuit wafer; removing material from the backside of the integrated circuit wafer; and dicing the integrated circuit wafer through the protective adhesive to form an integrated circuit die.
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