Invention Grant
- Patent Title: Sectional field effect devices and method of fabrication
- Patent Title (中): 截面场效应器件及其制造方法
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Application No.: US12142849Application Date: 2008-06-20
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Publication No.: US07659153B2Publication Date: 2010-02-09
- Inventor: Ying Zhang , Bruce B. Doris , Thomas Safron Kanarsky , Meikei Ieong , Jakub Tadeusz Kedzierski
- Applicant: Ying Zhang , Bruce B. Doris , Thomas Safron Kanarsky , Meikei Ieong , Jakub Tadeusz Kedzierski
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent George Sai-Halasz
- Main IPC: H01L21/84
- IPC: H01L21/84

Abstract:
A field effect device is disclosed which has a body formed of a crystalline semiconductor material and has at least one vertically oriented section and at least one horizontally oriented section. The device is produced in SOI technology by fabricating first a formation of the device in masking insulators, and then transferring this formation through several etching steps into the SOI layer. The segmented field effect device combines FinFET, or fully depleted silicon-on-insulator FETs, type devices with fully depleted planar devices. This combination allows device width control with FinFET type devices. The segmented field effect device gives high current drive for a given layout area. The segmented field effect devices allow for the fabrication of high performance processors.
Public/Granted literature
- US20080254577A1 Sectional Field Effect Devices and Method of Fabrication Public/Granted day:2008-10-16
Information query
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