Invention Grant
US07659157B2 Dual metal gate finFETs with single or dual high-K gate dielectric
有权
具有单或双高K栅极电介质的双金属栅极finFET
- Patent Title: Dual metal gate finFETs with single or dual high-K gate dielectric
- Patent Title (中): 具有单或双高K栅极电介质的双金属栅极finFET
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Application No.: US11860840Application Date: 2007-09-25
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Publication No.: US07659157B2Publication Date: 2010-02-09
- Inventor: Brian J. Greene , Mahender Kumar
- Applicant: Brian J. Greene , Mahender Kumar
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnumann
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/8222

Abstract:
A first high-k gate dielectric layer and a first metal gate layer are formed on first and second semiconductor fins. A first metal gate ring is formed on the first semiconductor fin. In one embodiment, the first high-k gate dielectric layer remains on the second semiconductor fin. A second metal gate layer and a silicon containing layer are deposited and patterned to form gate electrodes. In another embodiment, a second high-k dielectric layer replaces the first high-k dielectric layer over the second semiconductor fin, followed by formation of a second metal gate layer. A first electrode comprising a first gate dielectric and a first metal gate is formed on the first semiconductor fin, while a second electrode comprising a second gate dielectric and a second metal gate is formed on the second semiconductor fin. Absence of high-k gate dielectric materials on a gate wiring prevents increase in parasitic resistance.
Public/Granted literature
- US20090078997A1 DUAL METAL GATE FINFETS WITH SINGLE OR DUAL HIGH-K GATE DIELECTRIC Public/Granted day:2009-03-26
Information query
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