Invention Grant
US07659489B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
有权
具有介电真空容器的环形低场反应气体和等离子体源
- Patent Title: Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
- Patent Title (中): 具有介电真空容器的环形低场反应气体和等离子体源
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Application No.: US11684916Application Date: 2007-03-12
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Publication No.: US07659489B2Publication Date: 2010-02-09
- Inventor: William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
- Applicant: William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouquian Shao
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: B23K10/00
- IPC: B23K10/00

Abstract:
Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
Public/Granted literature
- US20070145023A1 Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel Public/Granted day:2007-06-28
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