Invention Grant
US07659591B2 Apparatus having a layer of material configured as a reservoir having an interior capable of holding a liquid
有权
具有被配置为具有能够容纳液体的内部的储存器的材料层的装置
- Patent Title: Apparatus having a layer of material configured as a reservoir having an interior capable of holding a liquid
- Patent Title (中): 具有被配置为具有能够容纳液体的内部的储存器的材料层的装置
-
Application No.: US12199236Application Date: 2008-08-27
-
Publication No.: US07659591B2Publication Date: 2010-02-09
- Inventor: Vladimir A. Aksyuk , Nagesh R. Basavanhally , Omar D. Lopez , Chien-Shing Pai
- Applicant: Vladimir A. Aksyuk , Nagesh R. Basavanhally , Omar D. Lopez , Chien-Shing Pai
- Applicant Address: US NJ Murray Hill
- Assignee: Alcatel-Lucent USA Inc.
- Current Assignee: Alcatel-Lucent USA Inc.
- Current Assignee Address: US NJ Murray Hill
- Agency: Hitt Gaines, PC
- Main IPC: H01L29/788
- IPC: H01L29/788
Abstract:
The present invention provides an apparatus. The apparatus, in one embodiment, includes an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.
Public/Granted literature
- US20080316563A1 STRUCTURE FOR PROTECTING FEATURES DURING THE REMOVAL OF SACRIFICIAL MATERIALS Public/Granted day:2008-12-25
Information query
IPC分类:
