Invention Grant
- Patent Title: Optical element, optical module and method for manufacturing the same
- Patent Title (中): 光学元件,光学模块及其制造方法
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Application No.: US11457558Application Date: 2006-07-14
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Publication No.: US07659592B2Publication Date: 2010-02-09
- Inventor: Hajime Onishi , Masamitsu Mochizuki
- Applicant: Hajime Onishi , Masamitsu Mochizuki
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2005-206662 20050715
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01S5/026

Abstract:
A method for manufacturing an optical element having a surface-emitting type semiconductor laser and a photodetector element that detects light emitted from the surface-emitting type semiconductor laser, the method including the steps of: (a) laminating, above a substrate, semiconductor layers for forming a first mirror, an active layer, a second mirror, a photoabsorption layer, an etching stopper layer and a contact layer; (b) patterning the semiconductor layers to form at least a photoabsorption layer, an etching stopper layer and a contact layer; (c) forming an electrode above the contact layer; and (d) etching a portion of the contact layer until an upper surface of the etching stopper layer is exposed.
Public/Granted literature
- US20070015298A1 OPTICAL ELEMENT, OPTICAL MODULE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2007-01-18
Information query
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