Invention Grant
- Patent Title: On-chip cooling systems for integrated circuits
- Patent Title (中): 用于集成电路的片上冷却系统
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Application No.: US11869999Application Date: 2007-10-10
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Publication No.: US07659616B2Publication Date: 2010-02-09
- Inventor: Kaushik A. Kumar , Andres Fernando Munoz , Michael Ray Sievers , Richard Stephen Wise
- Applicant: Kaushik A. Kumar , Andres Fernando Munoz , Michael Ray Sievers , Richard Stephen Wise
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Steven Capella
- Main IPC: H01L23/34
- IPC: H01L23/34

Abstract:
Structures and methods for forming the same. A semiconductor chip includes a substrate and a transistor. The chip includes N interconnect layers on the substrate, N being a positive integer. The chip includes a cooling pipes system inside the N interconnect layers. The cooling pipes system does not include any solid or liquid material. Given any first point and any second point in the cooling pipes system, there exists a continuous path which connects the first and second points and which is totally within the cooling pipes system. A first portion of the cooling pipes system overlaps the transistor. A second portion of the cooling pipes system is higher than the substrate and lower than a top interconnect layer. The second portion is in direct physical contact with a surrounding ambient.
Public/Granted literature
- US20090096056A1 ON-CHIP COOLING SYSTEMS FOR INTEGRATED CIRCUITS Public/Granted day:2009-04-16
Information query
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