Invention Grant
- Patent Title: Contact structure comprising semiconductor and metal islands
- Patent Title (中): 包括半导体和金属岛的接触结构
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Application No.: US11186301Application Date: 2005-07-20
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Publication No.: US07659628B2Publication Date: 2010-02-09
- Inventor: Vladimir Arkhipov , Paul Heremans
- Applicant: Vladimir Arkhipov , Paul Heremans
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
Contact structures and methods for forming such contact structures are disclosed. An example contact structure includes a layer of semiconductor material having an interface and an electrical contact at the interface of the layer of semiconductor material, where the electrical contact includes a granular metal. An example method for forming a contact structure includes providing a substrate and producing a granular metal on at least part of the substrate, where the granular metal includes a cluster of metal islands extending essentially in a two-dimensional plane. The method further includes depositing a layer of a semiconductor material on top of the substrate and the cluster of metal islands.
Public/Granted literature
- US20060033208A1 Contacting structure for a semiconductor material and a method for providing such structures Public/Granted day:2006-02-16
Information query
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