Invention Grant
US07659652B2 Electrostatic actuator with interdigitated electrode structure 失效
具有交叉电极结构的静电执行器

Electrostatic actuator with interdigitated electrode structure
Abstract:
There is provided an electrostatic actuator with the interdigitated electrode structure comprising a movable rod 11 disposed in parallel with an alignment axis line Ox predetermined on a substrate; a movable interdigitated electrode 12 fixed on the both sides of a coupling point 11C on the movable rod 11 and having a plurality of movable electrode fingers 12b; fixed interdigitated electrodes 21, 22 fixed to the substrate and having a plurality of fixed electrode fingers 21b, 22b; and four hinges 23, 24 whose one ends are anchored respectively to the movable rod and the other ends are anchored to anchoring points 32A-32D of the substrate. Lengths of those hinges are longer than distances from anchoring points to the alignment axis line and a displacement Lc of a coupling point 11C in a direction orthogonal to the alignment axis line is reduced to be smaller than a distance between the respective movable electrode fingers and the closest fixed electrode finger.
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