Invention Grant
US07659733B2 Electrical open/short contact alignment structure for active region vs. gate region
失效
用于有源区域与栅极区域的电开/短接触对准结构
- Patent Title: Electrical open/short contact alignment structure for active region vs. gate region
- Patent Title (中): 用于有源区域与栅极区域的电开/短接触对准结构
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Application No.: US11559946Application Date: 2006-11-15
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Publication No.: US07659733B2Publication Date: 2010-02-09
- Inventor: Richard Lee Donze , Karl Robert Erickson , William Paul Hovis , John Edward Sheet, II , Jon Robert Tetzloff
- Applicant: Richard Lee Donze , Karl Robert Erickson , William Paul Hovis , John Edward Sheet, II , Jon Robert Tetzloff
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Robert R. Williams
- Main IPC: G01R31/26
- IPC: G01R31/26 ; H01L23/58 ; H01L21/66

Abstract:
An apparatus for measuring a structural characteristic between a polysilicon shape and a silicon area. The apparatus for measuring a structural characteristic between a polysilicon shape and a silicon area comprises the silicon area, and a plurality of polysilicon shapes each having a unique orientation relative to the silicon area wherein each of the polysilicon shapes is formed having an angle less than or equal to a critical angle. The critical angle is an angle at or below which a sidewall spacer no longer is formed on a polysilicon shape, thereby causing the polysilicon shape to short circuit to an underlying portion of the silicon area by way of a silicide bridge.
Public/Granted literature
- US20070068627A1 Electrical Open/Short Contact Alignment Structure for Active Region vs. Gate Region Public/Granted day:2007-03-29
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