Invention Grant
US07659736B2 Mechanically reconfigurable vertical tester interface for IC probing
有权
用于IC探测的机械可重构垂直测试仪接口
- Patent Title: Mechanically reconfigurable vertical tester interface for IC probing
- Patent Title (中): 用于IC探测的机械可重构垂直测试仪接口
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Application No.: US11761912Application Date: 2007-06-12
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Publication No.: US07659736B2Publication Date: 2010-02-09
- Inventor: Benjamin N. Eldridge , Barbara Vasquez , Makarand S. Shinde , Gaetan L. Mathieu , A. Nicholas Sporck
- Applicant: Benjamin N. Eldridge , Barbara Vasquez , Makarand S. Shinde , Gaetan L. Mathieu , A. Nicholas Sporck
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agent N. Kenneth Burraston
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A wafer test assembly includes multiple probe head substrates arranged like tiles with connectors attached to one side and probes supported on the opposing side. In one embodiment, flexible cable connectors directly connect the connectors on the probe head tile to a test head, while in another embodiment the flexible cables connect the probe head tile to a PCB providing horizontal routing to test head connectors. In one embodiment, leveling pins provide a simplified support structure connecting to a retaining element attached to the tiles to provide for applying a push-pull leveling force. A test head connector interface frame enables rearrangement of connectors between the test head and the probe card to provide for both full wafer contact or partial wafer contact. The test head connectors are rearranged by being slidable on rails, or pluggable and unpluggable enabling movement over a range of positions.
Public/Granted literature
- US20070229102A1 MECHANICALLY RECONFIGURABLE VERTICAL TESTER INTERFACE FOR IC PROBING Public/Granted day:2007-10-04
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